วารสารวิชาการเทคโนโลยีอุตสาหกรรม (J. Ind. Tech.) อยู่ในฐานข้อมูล Thai-Journal Citation Index Centre (TCI) กลุ่ม 1 (2564 - 2567) และ Asean Citation Index (ACI) มีค่า JIF = 0.094 และ T-JIF (3 ปีย้อนหลัง): 0.165 | The Journal of Industrial Technology (J. Ind. Tech.) is indexed in Thai-Journal Citation Index Centre (TCI) Tier 1 (2021 - 2024) and Asean Citation Index (ACI) with impact factor, T-JIF: 0.094 and 3-years T-JIF: 0.165

Microelectromechanical Systems
Type Of : Academic Manuscript
Type : Science
This article presents microelectromechanical systems (MEMS) that are mechanical part in micron level is drove by integrated circuit. Its structure consists of two principal components : a sensing or actuating element and a signal transconduction unit. The techniques used to fabricate MEMS are called micromachining. These are bulk micromachning ,surface micromachning and LiGA process. MEMS involve many materials for fabrication and packaging such as silicon, silicon compound, quartz, and GaAs etc. In MEMS packaging, not only are the sensing or actuation elements to be protect from a hostile environment, but they are also required to be in contact with environment to probe that environment the same time. MEMS products have become increasingly dominant in every aspect of commercial marketplace such as automotive industry, electronics industry, and health care industry etc.
Date01/07/2019 446

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